Enhanced Superconducting Nanowire Single Photon Detector Performances using Silicon Capping

C. Klein; S. Cohen; T. Descamps; A. Iovan; P. Zolotov; P. Vennéguès; I. Florea; F. Semond; V. Zwiller

Enhanced Superconducting Nanowire Single Photon Detector Performances using Silicon Capping

C. Klein, S. Cohen, T. Descamps, A. Iovan, P. Zolotov, P. Vennéguès, I. Florea, F. Semond, V. Zwiller

arXivarxiv/2602.15948Feb 17, 2026quant-phscore 0

Niobium Titanium nitride (NbTiN) based superconducting nanowire single photon detectors (SNSPDs) are known for their high performance across a wide spectral range, from the X-ray to the mid-infrared. Nonetheless, fabrication challenges and performance degradation attributable to surface oxidation and lack of uniformity in films thinner than 5 nm remain a significant barrier for achieving high-quality detectors. In this work, we study the influence of a Silicon capping layer on film properties and on the performance of SNSPDs. A Silicon capping layer effectively suppresses oxidation and…

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